Sunday, February 12, 2012

Mass Spectroscopy of Metastable Species during Plasma Processing - AZoNano.com

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AZoNano.com


Mass Spectroscopy of Metastable Species during Plasma Processing

AZoNano.com


The present data for mass spectrometer pressures of up to 4.10 -4 Torr using gas mixtures that include rare gases demonstrate clearly long-lived metastable atoms of the inert gases in both the source of the plasmas and the mass spectrometer.



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